Polycrystalline silicon valve

Polycrystalline silicon process
Improved Siemens method - closed-loop trichlorosilane hydrogen reduction method
Trichlorosilane is synthesized from hydrogen chloride and industrial silicon powder at a certain temperature, and then separated, distilled, and purified. The purified trichlorosilane is subjected to CVD reaction in a hydrogen reduction furnace to produce high-purity polycrystalline silicon.
The process includes synthesis purification reduction tail gas recovery hydrogenation and post-treatment.
Silane method - Silane thermal decomposition method (Asimi and SGS from the United States)
Silane SiH4 is produced through methods such as silicon tetrachloride hydrogenation, silicon alloy decomposition, hydride reduction, and direct hydrogenation of silicon. The resulting silane gas is purified and then used in a thermal decomposition furnace to produce rod-shaped high-purity polycrystalline silicon.
Fluidized bed method
Silicon tetrachloride, hydrogen gas, hydrogen chloride, and industrial silicon react in a fluidized bed at high temperature and high pressure to produce trichlorosilane, which is further dismutated and hydrogenated to produce dichlorosilane, which then generates silane gas. The gas is then passed into a fluidized bed reactor with small particle silicon powder added for heating and decomposition reaction, producing granular polycrystalline silicon products.
Polycrystalline silicon valve
Bellows valve: regulating valve, globe valve
HAST C or Monel
O-type cut-off ball valve
Wear resistant ball valve ball and seat are made of powder tungsten carbide high-speed injection or integral tungsten carbide, used for silicon powder transportation
Fluorine lined valve

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